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AS ISO 14606-2006

Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials

Standards Australia , 10/20/2006

Publisher: AS

File Format: PDF

$28.00$57.42


Standard By:Standards Australia , 10/20/2006
Published:10/20/2006
Pages:15
ISBN(s):0733777953
File Size:1 file , 690 KB
Language:English
Note:This product is unavailable in Ukraine, Russia, Belarus
Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.

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